| Ciri Umum | |
| Pangukuran | Ku cara maké 20 um-pitch (0,0008 inci) kaca lulus. |
| Kaca koefisien ékspansi termal | 8 ppm/k |
| Akurasi | ± 5 um (± 0,0002") ± 3 um (± 0,00012") |
| Laju maksimum | 120m / mnt |
| Geter maksimum | 20 g |
| Nyorong pindah | <5N |
| Suhu operasi | 0°...50℃ |
| Suhu neundeun | `-20°...70° |
| Beurat | 0,25KG + 2,25KG / M |
| Kalembaban relatif | 20...70 ℃ |
| Panyalindungan | IP 53 (Standar) IP 64 (DIN 40050) ngagunakeun pressurized |